发明名称 RESIST COMPOSITION
摘要 This resist composition contains a solvent and a solid component that contains a resist base material. The solid component is contained in an amount of 1-80% by mass and the solvent is contained in an amount of 20-99% by mass in this resist composition. The resist base material contains a compound represented by formula (1) (a ctt form) and a compound represented by formula (3). The ratio of the compound represented by formula (1) (the ctt form) in the resist base material is 65-99% by mass, and the mass ratio of the compound represented by formula (3) to the compound represented by formula (1) (the ctt form) is 0.01-0.53.
申请公布号 WO2014196425(A1) 申请公布日期 2014.12.11
申请号 WO2014JP64083 申请日期 2014.05.28
申请人 MITSUBISHI GAS CHEMICAL COMPANY, INC. 发明人 TAKASUKA, MASAAKI;ECHIGO, MASATOSHI;OKADA, YU;OCHIAI, YUMI
分类号 G03F7/004;C08G8/22;G03F7/038;H01L21/027 主分类号 G03F7/004
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