LED CHIP AND METHOD OF MANUFACTURING THE SAME

摘要

A method of manufacturing an LED chip includes: providing a laminated structure with a nanoimprinted material coated thereon; providing an imprinted mold with a patterned structure for pressing and curing the nanoimprinted material, removing the imprinted mold, etching the nanoimprinted material and the laminated structure; and forming electrodes on the etched laminated structure. An LED chip is also provided.

主权项

1. A method of manufacturing an LED chip, comprising:
providing a laminated structure with a nanoimprinted material formed on the laminated structure; providing an imprinted mold with a patterned structure for pressing the nanoimprinted material, wherein the patterned structure has a ladder-shaped cross-section with a bottom surface and a flank having an angle less than 45° defined therebetween; curing the nanoimprinted material and then removing the imprinted mold, with a corresponding patterned structure imprinted on the cured nanoimprinted material; etching the nanoimprinted material and the laminated structure; and forming electrodes on the etched laminated structure.