发明名称 CONSTRAINED DIE ADHESION CURE PROCESS
摘要 A clamping apparatus applies a force to a workpeice during processing. The clamping apparatus includes a base defining a work area configured to receive a joined structure having multiple elements. The base defines a recess in the work area. An adjustable mechanism is configured to releasably couple to the base and apply a adjustable downward force to the joined structure to bend the joined structure downwardly into the recess during a process. A resilient plunger is part of the adjustable mechanism. The resilient plunger extends downwardly from a top plate of the adjustable mechanism, and the resilient plunger is configured to contact a top of a first element of the joined structure to apply the downward force.
申请公布号 US2014359995(A1) 申请公布日期 2014.12.11
申请号 US201313910152 申请日期 2013.06.05
申请人 International Business Machines Corporation 发明人 Blackshear Edmund;Khanna Vijayeshwar D.;Mantilla Oswald J.
分类号 H01L21/687 主分类号 H01L21/687
代理机构 代理人
主权项 1. A clamping apparatus for applying a force to a workpeice during processing, comprising: a base defining a work area configured to receive a joined structure having multiple elements, the base defining a recess in the work area; an adjustable mechanism being configured to releasably couple to the base and apply a adjustable downward force to the joined structure to bend the joined structure downwardly into the recess during a process; and a resilient plunger being part of the adjustable mechanism, the resilient plunger extending downwardly from a top plate of the adjustable mechanism, the resilient plunger being configured to contact a top of a first element of the joined structure to apply the downward force.
地址 Armonk NY US
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