发明名称 |
CONSTRAINED DIE ADHESION CURE PROCESS |
摘要 |
A clamping apparatus applies a force to a workpeice during processing. The clamping apparatus includes a base defining a work area configured to receive a joined structure having multiple elements. The base defines a recess in the work area. An adjustable mechanism is configured to releasably couple to the base and apply a adjustable downward force to the joined structure to bend the joined structure downwardly into the recess during a process. A resilient plunger is part of the adjustable mechanism. The resilient plunger extends downwardly from a top plate of the adjustable mechanism, and the resilient plunger is configured to contact a top of a first element of the joined structure to apply the downward force. |
申请公布号 |
US2014359995(A1) |
申请公布日期 |
2014.12.11 |
申请号 |
US201313910152 |
申请日期 |
2013.06.05 |
申请人 |
International Business Machines Corporation |
发明人 |
Blackshear Edmund;Khanna Vijayeshwar D.;Mantilla Oswald J. |
分类号 |
H01L21/687 |
主分类号 |
H01L21/687 |
代理机构 |
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代理人 |
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主权项 |
1. A clamping apparatus for applying a force to a workpeice during processing, comprising:
a base defining a work area configured to receive a joined structure having multiple elements, the base defining a recess in the work area; an adjustable mechanism being configured to releasably couple to the base and apply a adjustable downward force to the joined structure to bend the joined structure downwardly into the recess during a process; and a resilient plunger being part of the adjustable mechanism, the resilient plunger extending downwardly from a top plate of the adjustable mechanism, the resilient plunger being configured to contact a top of a first element of the joined structure to apply the downward force. |
地址 |
Armonk NY US |