| 摘要 |
PROBLEM TO BE SOLVED: To manufacture a magnetic sensor which is superior in industrial mass-productivity and has a sensor substrate with high slidability. SOLUTION: A method of manufacturing the magnetic sensor includes the processes of: coating a detection element formed on an Si wafer with photoresist; heating the photoresist to form a resist pattern having a convex surface at a ridge; dry-etching the resist pattern and the Si wafer to transfer at least a part of the convex surface to the Si wafer; and cutting the Si wafer to obtain a rectangular sensor substrate having at least the part of the convex surface at the ridge. COPYRIGHT: (C)2012,JPO&INPIT |
