Electromechanical actuator with interdigital electrodes

摘要

The actuator has two sets of parallel conductive plates e.g. movable plates (PM) and fixed plates (PF) respectively provided on a movable element and a plane substrate (10). The sets of the plates are interdigitated symmetrically with each other and mutually covered on a portion of height such that electric control voltage applied between the plates produces electrostatic force having a component along the height of the plates. Opposed ends of the movable plates are mechanically and electrically secured with end crosspieces (22, 24) facing opposed ends of the fixed plates.