MEMS DEVICE AND ELECTRONIC INSTRUMENT HAVING PROJECTOR FUNCTION

摘要

In a MEMS device (1), a first drive portion (40) is divided into a first drive section (41) and a second drive section (42). A second drive portion (50) is divided into a third drive section (51) and a fourth drive section (52). The first drive section, the second drive section, the third drive section, and the fourth drive section are controlled for driving independently of each other to incline an optical component (10).