| 摘要 |
PROBLEM TO BE SOLVED: To provide an inspection head of a surface inspection apparatus that is unnecessary to replace even when there is a difference in the shape of the inner circumference of a workpiece. SOLUTION: The inspections head 16 includes a sensor head 21 with a hollow cylinder-like shape that is inserted in the workpiece 100 while being rotating around the axis AX of the cylinder-like shape, and the sensor head 21 has a first cylindrical unit 21a with a predetermined internal diameter and a second cylindrical unit 21b with an internal diameter greater than that of the first cylindrical unit 21a, which are provided in the order from the distal end of the head, a taper unit 21d formed taper-like between the first and second cylindrical units 21a, 21b, in which inspection light is passed through the sensor head 21 through a lens 17 to gather the inspection light and is irradiated from an opening 16a provided on the outer of the first cylindrical unit 21a to an inner circumference 100a. COPYRIGHT: (C)2010,JPO&INPIT |
