| 摘要 |
PROBLEM TO BE SOLVED: To provide a thermopile heat sensor which is capable of improving the measurement precision of heat conductivity by maintaining a temperature difference between thermocouples to efficiently generate a thermo-electromotive force required for measurement. SOLUTION: In the heat flow sensor, a plurality of first and second through holes 5 and 6 arrayed in horizontal and vertical directions are formed in an insulating wiring board 4, and first and second metal connectors 7 and 8 made of dissimilar metal materials are alternately disposed in the respective first and second through holes 5 and 6. The first and second metal connectors 7 and 8 are connected in series by first surface metal layers 19 and second surface metal layers 20 similar to the first metal connectors 7, and constitute thermocouples, respectively. In narrowed parts 19a and 20a of the first surface metal layers 9 and the second surface metal layers 10, the first surface metal layers and the second surface metal layers are connected to have narrow shapes so that a heat flow passing the first metal connectors 7 disposed in the first through holes 5 is reduced, and thus a cross-section area which heat passes is reduced. COPYRIGHT: (C)2012,JPO&INPIT |
