发明名称 ろ過方法、およびそれを用いた研磨用組成物の精製方法ならびにろ過に用いるフィルターの再生方法およびフィルター再生装置
摘要 <p>Provided is a filtration method which enables filter life prolongation and regeneration without lowering operating efficiency. Also provided are a method and apparatus for filter regeneration by which a filter is efficiently regenerated. The filtration method comprises using a resinous-medium filter to filtrate a liquid, and is characterized by propagating an ultrasonic wave having a frequency of 30 kHz or higher during the filtration or during a temporary stop of the filtration or after completion of the filtration. When an abrasive composition is filtered by this filtration method, the composition can be efficiently purified. The method for filter regeneration comprises propagating, to a spent resinous filter, an ultrasonic wave having a frequency of 30 kHz or higher.</p>
申请公布号 JP5638390(B2) 申请公布日期 2014.12.10
申请号 JP20100520813 申请日期 2009.06.24
申请人 发明人
分类号 B01D65/08;B01D29/01;B01D29/11;B01D29/62;B01D29/66;B01D29/74;B01D39/16;B01D63/00;B01D65/02;B01D71/10;B01D71/36;B01D71/50;B01D71/56;B01D71/68 主分类号 B01D65/08
代理机构 代理人
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