| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for manufacturing a highly efficient solar cell at simple processes.SOLUTION: Heat treatment is performed while two sheets of substrates are overlapped. In the heat treatment, both of diffusion of a dopant and formation of a silicon thermal oxide film are performed in a same batch. As a result, a diffusion layer and the silicon thermal oxide film are formed on a first main surface of each substrate, and only a thermal oxide film is formed on a second main surface. The diffusion layer and the oxide film on the second main surface can be utilized as an emitter layer of a solar cell and a passivation film, respectively. |
