| 摘要 |
PROBLEM TO BE SOLVED: To provide an evaluation substrate that hardly causes variations in test temperature and is capable of precisely evaluating temperature characteristics of a sample even when a sample performing self-heating is evaluated.SOLUTION: An evaluation substrate evaluates a sample 10 by energizing the sample 10 to expose the sample 10 to a desired temperature. The evaluation substrate includes: a substrate body 2 having a planar area; a mount part 3 capable of mounting the sample 10; and a heater 8 for heating the substrate body 2. The evaluation substrate is configured such that the mount parts 3 are located at one main surface side of the substrate body 2, the heater 8 is distributed in a planar fashion at the other main surface side of the substrate body 2, being integrated. |
