CHARGED PARTICLE RAY APPLICATION DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a charged particle ray application device capable of correcting chromatic aberration and spherical aberration and performing high-resolution observation and inspection without using an ultra-highly stable power supply.SOLUTION: A charged particle ray application device irradiating a sample 103 with a charged particle ray 101, comprises at least one deflector array 107 in which a plurality of deflectors are arranged in a region including an optical axis 104 of the charged particle ray 101. The deflector array 107 has a function of a concave lens to the charged particle ray 101.