| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a table device capable of reducing a load applied to an actuator.SOLUTION: A table device comprises: a first member that can move in a horizontal plane; a second member that can move relatively to the first member; a first guide device that is at least partially arranged on the first member, and guides the second member so that the second member moves in a direction parallel to a first shaft orthogonal to the horizontal plane by movement of the first member; a table supported by the second member; a third member at least one part of which on an upper face side is connected to the table; a bearing member having a first supply port capable of supplying gas between it and a side face of the third member, forming a gas bearing between it and the side face of the third member by the gas supplied from the first supply port, and supporting the third member movably in the direction parallel to the first shaft; an actuator for generating power to move the first member; and a gravity compensating device face to a space to which a lower face of the third member is faced, and having a second supply port for supplying the gas to the space.</p> |
