OPTICAL SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a highly reliable optical semiconductor device including an optical element having satisfactory optical coupling integrally formed easily and surely at the prescribed position of an optical waveguide in which a plurality of optical waveguides and optical elements are formable in an array shape.SOLUTION: The optical semiconductor device includes: an optical waveguide having a semiconductor laminate structure 2 and a semiconductor film 3 covering this; and an optical element 10 formed on the optical waveguide. The optical waveguide is configured such that one end surface of the semiconductor laminate structure 2 is an inclined surface 2A in a forward tapered shape, and the semiconductor film 3 is configured to continuously cover the semiconductor laminate structure 2 from the upper surface to the inclined surface, and the optical element 10 is positioned above the inclined surface 2A via the semiconductor film 3.