| 摘要 |
PROBLEM TO BE SOLVED: To provide an evaluation device of semiconductor device which allows for high accuracy detection of the position of a semiconductor substrate in a holding part, when the evaluation device is arranged in the holding part.SOLUTION: An evaluation device of semiconductor device for evaluating a semiconductor device formed on a semiconductor substrate 100 electrically includes a holding part 2 for holding the semiconductor substrate 100 on a surface 2A, and a detector 3 for detecting the irregularities on the surface 2A of the holding part 2. The holding part 2 includes a plurality of grooves 20 on the surface 2A, and the plurality of grooves 20 are formed to overlap the outer periphery of the semiconductor substrate 100 while locating some of them on the outside thereof, when the semiconductor substrate 100 is held on the surface 2A. |
