| 摘要 |
The present invention relates to an atomic force microscope with a rotatable probe and a scanning method using the same. According to the present invention, an atomic force microscope with a rotatable probe comprises: a horizontal driving part moving a specimen on a plane, and precisely moving the specimen on the plane and up and down; a vertical guide frame coupled to the side surface of the horizontal driving part, and extended upwards; a vertical driving part coupled to the vertical guide frame, and capable of reciprocating vertically; a probe rotation driving part coupled to the vertical driving part, moved up and down along with the vertical driving part, and generating a rotating force; and a scan head part coupled to the driving shaft part of the probe rotation driving part, rotated by receiving the rotating force from the probe rotation driving part, having the probe coupled to the lower side thereof, capable of scanning the surface of the specimen non-directionally by rotating the probe, and controlling the rotational center of the probe to be positioned on the rotational center of the probe rotation driving part. According to the present invention, the probe is rotatable to convert the posture of the probe according to a scanning direction while the surface of the specimen is scanned non-directionally, thereby scanning the surface of the specimen without the loss of existing data or a coordinate conversion process for a measurement value. |
