发明名称 SEMICONDUCTOR DEVICE
摘要 A semiconductor substrate (20) has an element section (20E) and a termination section (20T) positioned outside of the element section (20E). A first electrode layer (40) is disposed on a first surface (P1) of the semiconductor substrate (20). A second electrode layer (50) is disposed on the element section (20E) on a second surface (P2) of the semiconductor substrate (20). An interlayer insulating film (60) is disposed on the second surface (P2) of the semiconductor substrate (20). The interlayer insulating film (60) comprises: an element insulating section that provides insulation between part of the element section (20E) of the semiconductor substrate (20) and the second electrode layer (50); and a termination insulating section that covers the termination section (20T) of the semiconductor substrate (20). The termination insulating section includes a high-dielectric-constant film (62) having a higher dielectric constant than the dielectric constant of the element insulating section.
申请公布号 WO2014192444(A1) 申请公布日期 2014.12.04
申请号 WO2014JP60583 申请日期 2014.04.14
申请人 SUMITOMO ELECTRIC INDUSTRIES, LTD. 发明人 MASUDA, TAKEYOSHI;YAMADA, SHUNSUKE
分类号 H01L29/78;H01L21/28;H01L21/283;H01L21/336;H01L21/337;H01L21/338;H01L29/06;H01L29/12;H01L29/16;H01L29/161;H01L29/20;H01L29/41;H01L29/423;H01L29/47;H01L29/49;H01L29/808;H01L29/812;H01L29/872 主分类号 H01L29/78
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