发明名称 CUTTING DEVICE AND METHOD FOR PROCESSING PACKAGE SUBSTRATE
摘要 PROBLEM TO BE SOLVED: To provide a cutting device capable of removing a surplus connection part when cutting a package substrate in a jig-type holding table.SOLUTION: A cutting device comprises at least a holding table 4 which sucks and holds a package substrate 5 formed of a device part 51 and a surplus connection part 52 and cutting means including a cutting blade for cutting the package substrate sucked and held in the holding table and a cutting water supply nozzle. The holding table comprises: a clearance groove 41 formed in the position corresponding to division schedule lines 56A and 56B of the package substrate; a plurality of suction holes 42 for sucking and holding a plurality of package devices formed in the area partitioned by the clearance groove; a suction source communicating with the suction holes; a plurality of air nozzles 43 formed in the position corresponding to the surplus connection part; and a compressed air supply source communicating with the air nozzles.
申请公布号 JP2014225489(A) 申请公布日期 2014.12.04
申请号 JP20130102742 申请日期 2013.05.15
申请人 DISCO ABRASIVE SYST LTD 发明人 SAKAI MAKI;UEYAMA HIROMITSU
分类号 H01L21/301 主分类号 H01L21/301
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