BSI CMOS IMAGE SENSOR

摘要

PROBLEM TO BE SOLVED: To provide a back surface-illuminated complementary metal-oxide semiconductor (CMOS) image sensor.SOLUTION: A back surface-illuminated CMOS image sensor includes: a substrate including a photodiode array; a protective layer disposed on the photodiode array; and a plurality of color filters formed on the protective layer. Each color filter includes: a color filter array corresponding to one photodiode of the photodiode array; a first grid formed on the protective layer, filled into the spaces between the color filters, and having a refractive index lower than approximately 1.46 and lower than that of the color filters; and a metal grid aligned to the first grid between the color filters and having an extinction coefficient that is greater than zero.