发明名称 |
SEMICONDUCTOR WAFER, PROBE CARD, SEMICONDUCTOR WAFER TESTING DEVICE, AND SEMICONDUCTOR WAFER TESTING METHOD |
摘要 |
<p>PROBLEM TO BE SOLVED: To provide a wafer that enables testing of a plurality of IC chips in wafer test, and to provide a probe card that enables testing of the plurality of IC chips and that is easily manufactured and repaired.SOLUTION: In a semiconductor wafer (130), a plurality of IC chips (132) are formed. Pads are arranged so that a center position of a pad (133a) of one IC chip (132a) of a pair of adjacent IC chips, and a center position of a pad (133b) of the other IC chip (132b) of the pair of adjacent IC chips are not overlapped with each other in a direction along a boundary line between the pair of IC chips.</p> |
申请公布号 |
JP2014225532(A) |
申请公布日期 |
2014.12.04 |
申请号 |
JP20130103397 |
申请日期 |
2013.05.15 |
申请人 |
RICOH CO LTD |
发明人 |
NAKAMURA KEIJI |
分类号 |
H01L21/66;G01R31/26;H01L21/822;H01L27/04 |
主分类号 |
H01L21/66 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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