发明名称 SEMICONDUCTOR WAFER, PROBE CARD, SEMICONDUCTOR WAFER TESTING DEVICE, AND SEMICONDUCTOR WAFER TESTING METHOD
摘要 <p>PROBLEM TO BE SOLVED: To provide a wafer that enables testing of a plurality of IC chips in wafer test, and to provide a probe card that enables testing of the plurality of IC chips and that is easily manufactured and repaired.SOLUTION: In a semiconductor wafer (130), a plurality of IC chips (132) are formed. Pads are arranged so that a center position of a pad (133a) of one IC chip (132a) of a pair of adjacent IC chips, and a center position of a pad (133b) of the other IC chip (132b) of the pair of adjacent IC chips are not overlapped with each other in a direction along a boundary line between the pair of IC chips.</p>
申请公布号 JP2014225532(A) 申请公布日期 2014.12.04
申请号 JP20130103397 申请日期 2013.05.15
申请人 RICOH CO LTD 发明人 NAKAMURA KEIJI
分类号 H01L21/66;G01R31/26;H01L21/822;H01L27/04 主分类号 H01L21/66
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