| 发明名称 |
MICRO PICK UP ARRAY WITH COMPLIANT CONTACT |
| 摘要 |
Micro pick up arrays for transferring micro devices from a carrier substrate are disclosed. In an embodiment, a micro pick up array includes a compliant contact for delivering an operating voltage from a voltage source to an array of electrostatic transfer heads. In an embodiment, the compliant contact is moveable relative to a base substrate of the micro pick up array. |
| 申请公布号 |
US2014355168(A1) |
申请公布日期 |
2014.12.04 |
| 申请号 |
US201313909892 |
申请日期 |
2013.06.04 |
| 申请人 |
LuxVue Technology Corporation |
发明人 |
Bibl Andreas;Golda Dariusz |
| 分类号 |
H01L21/683;H01L21/768 |
主分类号 |
H01L21/683 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A micro pick up array comprising:
a base substrate having a via; a flexible membrane over the via; a plug within the via and supported by the flexible membrane, wherein a gap separates the plug from the base substrate and the plug is moveable relative to the base substrate; and an array of electrostatic transfer heads electrically coupled with the plug. |
| 地址 |
Santa Clara CA US |
