| 摘要 |
Provided are a unidirectional MEMS microphone and an MEMS device. The unidirectional MEMS microphone includes a substrate including a first sound hole; a housing which includes a second sound hole and covers the substrate; and a MEMS device which is formed in the housing on the substrate. The MEMS device includes a back plate and a diaphragm for converting a sound signal into an electric signal, and a delay unit which is closer to the first sound hole than the diaphragm, is closer to the second sound hole than the second sound hole, and reduces a noise signal. |
