| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a substrate processor for conducting process with a small footprint and high precision. <P>SOLUTION: A body 2 of a substrate processor 1 has a stage 3 for holding a substrate 90, a crosslinked structure 4, AC coreless linear servomotors 50 and 51 with no iron-core as a motor for generating drive force for moving the crosslinked structure 4 in the X-axis direction, linear encoders 52 and 53 for detecting a position of the crosslinked structure 4, and a pair of travel rails 31a on both sides of a holding face 30 of the stage 3. The crosslinked structure 4 has a nozzle supporting part 40 to which a slit nozzle for discharging a resist liquid is attached, and lifting or lowering mechanisms 43 and 44 for lifting or lowering the nozzle supporting part 40 in the Z-axis direction. <P>COPYRIGHT: (C)2003,JPO |
