Coating Insulating Materials For Improved Life

摘要

A system for extending the life of insulating components disposed within a housing, such as an ion implanter, is disclosed. The system includes one or more insulating components, disposed in the housing, which are coated with a diamond like carbon (DLC) coating. The insulating components may be bushings or any insulating component used to electrically isolate two components having different voltage potentials, such as electrodes. This DLC coating retards the deposition of metals, such as those contained in the ion source, on the insulating components. This reduces the likelihood or electrical arcing or other phenomenon that affect the useful life of these insulating component.

主权项

1. An ion implanter, comprising:
a housing; an ion source, for generation of ions for implanting into a workpiece, in said housing; a source bushing to electrically isolate said ion source from said housing; an electrode to extract ions from said ion source; a first insulating component to hold said electrode in place; at least one second insulating component disposed in said housing; and a workpiece support on which said workpiece to be implanted is disposed, wherein at least one of said first insulating component, said second insulating component and said source bushing is coated with diamond like carbon (DLC).