| 摘要 |
Provided are a rotor having a load variation relaxation structure that relaxes load variations in the boundary portion of a cylindrical body and a cylindrical rotating portion, and a vacuum pump in which rotation performance (that is, discharge performance), reliability, and durability are improved over those in the related art by incorporating the cylindrical body. In the vacuum pump, a rotating portion made from a metal (aluminum alloy or the like) is provided with the load variation relaxation structure, which relaxes load variations caused by thermal stresses, in a joined section where the cylindrical rotating portion formed from a different material (FRP or the like) is joined. More specifically, any one from among a gentle taper, a curved section and a taper section, and a corner R is provided in the boundary portion of the rotating portion and the cylindrical rotating portion. |
