发明名称 |
METHOD AND APPARATUS SEPARATE MODULES FOR PROCESSING A SUBSTRATE |
摘要 |
A method and apparatus for heat treating a photovoltaic device. The apparatus includes a heating module, a processing module, and a cooling module in which the operating temperatures of the modules may be controlled separately. The heating module is configured to pre-heat a substrate and stabilize the substrate at the desired target temperature, the processing module is configured to thermally process the substrate, and the cooling module is configured for post-treatment cooling of the substrate. |
申请公布号 |
EP2807671(A1) |
申请公布日期 |
2014.12.03 |
申请号 |
EP20130705625 |
申请日期 |
2013.01.24 |
申请人 |
FIRST SOLAR, INC |
发明人 |
LIM, CHONG;KARPENKO, OLEH, P.;GUPTA, AKHLESH |
分类号 |
H01L21/67 |
主分类号 |
H01L21/67 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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