发明名称 半導体パッケージの製造方法および半導体パッケージ
摘要 PROBLEM TO BE SOLVED: To provide a technology capable of improving reliability of a semiconductor package.SOLUTION: The method for manufacturing the semiconductor package includes the steps of: forming a wire 2 (wiring layer) having an electrode pad 2a on a build-up resin layer 1 (build-up substrate); subjecting the surface of the wire 2 to a roughening treatment; forming an inorganic insulating film 5 on the build-up resin layer 1 so as to cover the wire 2, forming a resist film 9 on the build-up resin layer 1 so as to cover the inorganic insulating film 5, and then removing the resist film 9 on the electrode pad 2a; removing the inorganic insulating film 5 on the electrode pad 2a by using the resist film 9 as a mask to expose the electrode pad 2a; and removing the remaining resist film 9 to form a solder resist layer for exposing the electrode pad 2a on the build-up resin layer 1 so as to cover the inorganic insulating film 5.
申请公布号 JP5633095(B2) 申请公布日期 2014.12.03
申请号 JP20130022824 申请日期 2013.02.08
申请人 新光電気工業株式会社 发明人 清水 規良;六川 昭雄
分类号 H01L23/12 主分类号 H01L23/12
代理机构 代理人
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