Apparatus and method for evaluating layers in a multi-layer structure

摘要

An apparatus for evaluating layers, including interlayer gaps, in a multi-layer structure; the multi-layer structure presenting a plurality of edges generally aligned athwart an axis; the apparatus includes: (a) a sensing unit configured for sensing at least one parameter; (b) a positioning unit coupled with the sensing unit; the positioning unit being configured to effect moving the sensing unit generally along the axis; and (c) a control unit coupled with at least one of the positioning unit and the sensing unit. The control unit provides an electrical signal to the sensing unit. The control unit monitors changes in the at least one parameter as the sensing unit moves past the plurality of edges. The control unit employs the changes in the at least one parameter to effect the evaluating.

主权项

1. An apparatus for evaluating interlayer gaps in a multi-layer structure; said multi-layer structure presenting a plurality of edges generally aligned athwart an axis and that surround an aperture traversing at least a portion of said multi-layer structure and generally parallel with said axis; said apparatus comprising:
(a) a sensing unit configured for sensing at least one parameter; (b) a positioning unit coupled with said sensing unit; said positioning unit comprising a positioning frame selectively coupled to said multi-layer structure such that said positioning frame substantially circumscribes said aperture when coupled to said multi-layer structure and such that said sensing unit is aligned substantially coaxially with said axis, said positioning unit being configured to effect moving said sensing unit generally along said axis through said aperture with a clearance between said sensor unit and said multi-layer structure, and configured to effect rotation of said sensing unit about said axis; and (c) a control unit coupled with at least one of said positioning unit and said sensing unit; said control unit providing an electrical signal to said sensing unit; said control unit monitoring changes in said at least one parameter as said sensing unit moves past said plurality of edges and rotates within said aperture; said control unit employing said changes in said at least one parameter to effect said evaluating of a distance between adjacent layers of said multi-layer structure and a thickness of layers of said multi-layer structure.