| 摘要 |
<p>The present invention relates to a teaching jig for a semiconductor wafer mounted with a semiconductor wafer carrier to reteach when a damage, breakdown, or an error of an index arm extracting a wafer from a loading table, and when preventive maintenance (PM) occurs. During a teaching work to reset the manufacture and installation of the index arm, the present invention can operate accurately and conveniently the measurement of the index arm and the wafer, facilitate correction by the measurement, and conveniently confirm whether the wafer is accurately inserted and extracted by the index arm while the index arm and the wafer are held; thereby facilitating and accurately confirming the operative relationship between the index arm and the wafer when teaching.</p> |
