发明名称 |
Semiconductor device design method, system and computer-readable medium |
摘要 |
A semiconductor device design system comprising at least one processor is configured to define a resistance-capacitance (RC) extraction tool for determining a distance between first and second through-semiconductor-vias extracted from a layout of a semiconductor device. The semiconductor device has a semiconductor substrate and the first and second through-semiconductor-vias in the semiconductor substrate. The semiconductor device design system comprising the at least one processor is also configured to extract parasitic parameters of a coupling in the semiconductor substrate based on the distance determined by the RC extraction tool and a model of the coupling included in a simulation tool. |
申请公布号 |
US8904337(B2) |
申请公布日期 |
2014.12.02 |
申请号 |
US201414200714 |
申请日期 |
2014.03.07 |
申请人 |
Taiwan Semiconductor Manufacturing Company, Ltd. |
发明人 |
Yang Ching-Shun;Wu Ze-Ming;Chao Hsiao-Chu;Cheng Yi-Kan |
分类号 |
G06F11/22;G06F17/50;G03F7/00 |
主分类号 |
G06F11/22 |
代理机构 |
Lowe Hauptman & Ham, LLP |
代理人 |
Lowe Hauptman & Ham, LLP |
主权项 |
1. A semiconductor device design system, comprising at least one processor configured to:
define a resistance-capacitance (RC) extraction tool for determining a distance between first and second through-semiconductor-vias extracted from a layout of a semiconductor device, said semiconductor device having a semiconductor substrate and the first and second through-semiconductor-vias in the semiconductor substrate; and extract parasitic parameters of a coupling in the semiconductor substrate based on the distance determined by the RC extraction tool and a model of the coupling included in a simulation tool. |
地址 |
TW |