| 摘要 |
Provided is a liquid heating apparatus capable of heating fluid such as peroxosulfuric acid solution to high temperature in a short time. The heating apparatus includes: a flow channel member forming a flow channel 4 allowing liquid to flow and having flow channel thickness of 10 mm or smaller, the flow channel member composed of material transmitting near-infrared rays; and a near-infrared heaters 7, 8 placed over the outside of at least one of opposite flow channel surfaces of the flow channel and heating the liquid in the flow channel. The liquid flowing through the flow channel is instantaneously and evenly heated using near-infrared rays. It is preferable that spacers 6 be further provided within the flow channel 4 in order to limit the volume of the flow channel. Since not only the residence time in the heating apparatus can be shortened but the possible largest heat transfer area can be also maintained by decreasing the volume of the flow channel of the heating apparatus and by increasing the flow velocity in the heating apparatus, it is possible to increase the temperature of liquid to be heated to high temperature in a very short time even if the preset temperature of heat transfer surfaces is low. |
