发明名称 |
CAPACITIVE SENSING SYSTEM |
摘要 |
A capacitive sensing system with a sensor having a thin film structure. The thin film structure includes a first insulating layer and a first conductive film having a sensing electrode formed on a first surface of the first insulating layer and a second conductive film having a back guard electrode. The back guard electrode is formed in a single plane and has a peripheral portion in the same plane, and is disposed on a second surface of the first insulating layer and a first surface of a second insulating layer or protective layer. The peripheral portion of the back guard electrode extends beyond the sensing electrode to form a side guard electrode which substantially or completely surrounds the sensing electrode. |
申请公布号 |
KR20140136533(A) |
申请公布日期 |
2014.11.28 |
申请号 |
KR20147032749 |
申请日期 |
2010.12.29 |
申请人 |
MAPPER LITHOGRAPHY IP B.V. |
发明人 |
DE BOER GUIDO;VAN BAAR JOHNNY JOANNES JACOBUS;PADHYE KAUSTUBH PRABODH;MOSSEL ROBERT;VERGEER NIELS;STEENBRINK STIJN WILLEM HERMAN KAREL |
分类号 |
H01L21/027;G01B7/02;G01D5/24;G03F7/20 |
主分类号 |
H01L21/027 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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