发明名称 CAPACITIVE SENSING SYSTEM
摘要 A capacitive sensing system with a sensor having a thin film structure. The thin film structure includes a first insulating layer and a first conductive film having a sensing electrode formed on a first surface of the first insulating layer and a second conductive film having a back guard electrode. The back guard electrode is formed in a single plane and has a peripheral portion in the same plane, and is disposed on a second surface of the first insulating layer and a first surface of a second insulating layer or protective layer. The peripheral portion of the back guard electrode extends beyond the sensing electrode to form a side guard electrode which substantially or completely surrounds the sensing electrode.
申请公布号 KR20140136533(A) 申请公布日期 2014.11.28
申请号 KR20147032749 申请日期 2010.12.29
申请人 MAPPER LITHOGRAPHY IP B.V. 发明人 DE BOER GUIDO;VAN BAAR JOHNNY JOANNES JACOBUS;PADHYE KAUSTUBH PRABODH;MOSSEL ROBERT;VERGEER NIELS;STEENBRINK STIJN WILLEM HERMAN KAREL
分类号 H01L21/027;G01B7/02;G01D5/24;G03F7/20 主分类号 H01L21/027
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