发明名称 METHOD OF OBTAINING BIG-VOLUME MONOCRYSTALS OF GALLIUM ANTIMONIDE WITH LOW DISLOCATION DENSITY
摘要 FIELD: chemistry.SUBSTANCE: invention relates to field of obtaining semi-conductor materials, which are applied as substrate material in isoperiod heterostructures based on triple and fourfold solid solutions in systems Al-Ga-As-Sb and In-Ga-As-Sb, which make it possible to create broad range of optoelectronic devices (sources and receivers of irradiation on spectral range 1.3-2.5 mcm). Method includes synthesis from initial components and growing of monocrystals by method of Czochralski in hydrogen atmosphere on seed, oriented in crystallographic direction [100]. To initial components added is isovalent admixture of indium in form of especially pure indium antimonide (InSb) in the interval of elementary indium concentration (2-4)×10at/cm, with synthesis and growing of monocrystals being realised in single technological cycle.EFFECT: invention makes it possible to obtain big-volume low dislocation density monocrystals of gallium antimonide with reduced dislocation density.2 cl, 1 dwg, 2 tbl, 1 ex
申请公布号 RU2534106(C1) 申请公布日期 2014.11.27
申请号 RU20130134669 申请日期 2013.07.24
申请人 OTKRYTOE AKTSIONERNOE OBSHCHESTVO "GOSUDARSTVENNYJ NAUCHNO-ISSLEDOVATEL'SKIJ I PROEKTNYJ INSTITUT REDKOMETALLICHESKOJ PROMYSHLENNOSTI OAO "GIREDMET" 发明人 EZHLOV VADIM SERGEEVICH;MIL'VIDSKAJA ALLA GEORGIEVNA;MOLODTSOVA ELENA VLADIMIROVNA
分类号 C30B15/04;C30B15/36;C30B29/40 主分类号 C30B15/04
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