| 发明名称 |
MEMS BACKPLATE, MEMS MICROPHONE COMPRISING A MEMS BACKPLATE AND METHOD FOR MANUFACTURING A MEMS MICROPHONE |
| 摘要 |
A MEMS backplate enables MEMS microphones with reduced parasitic capacitance. A MEMS backplate includes a central area and a perforation in the central area. A suspension area surrounds the central area at least partially. An aperture is disposed in the suspension area. |
| 申请公布号 |
US2014346621(A1) |
申请公布日期 |
2014.11.27 |
| 申请号 |
US201113261882 |
申请日期 |
2011.11.14 |
| 申请人 |
EPCOS AG |
发明人 |
Johansen Leif Steen;Ravnkilde Jan Tue;Rombach Pirmin Hermann Otto;Rasmussen Kurt;Mortensen Dennis |
| 分类号 |
B81B3/00;B81C1/00;H04R31/00 |
主分类号 |
B81B3/00 |
| 代理机构 |
|
代理人 |
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| 主权项 |
|
| 地址 |
Muenchen DE |
