| 摘要 |
PROBLEM TO BE SOLVED: To provide an electrode-embedded quartz member that is a member for semiconductor processing of an electrostatic chuck, a heater, etc., and can securely obtain conduction to an internal electrode without any trouble such as oxidation of an internal electrode and a decrease in strength of the member and can have a feeding terminal set at an arbitrary position, and a method of manufacturing the same.SOLUTION: There is provided an electrode-embedded quartz member such that a first electrode 7 and a second electrode 2 arranged at different depths from one main surface of a quartz glass plate and a columnar electric conduction body 4 sandwiched between the first electrode 7 and second electrode 2 are embedded in quartz glass plates 1, 3, and 6; the electric conduction body 4 has a through body 43 embedded in the quartz glass columnar body 41; a coating layer 42 is formed of a conductive material on a top surface of the quartz glass columnar body 41; and a top surface and a bottom surface are joined with the first electrode 7 and second electrode 2. |
