| 摘要 |
In a drive method for a spatial light modulator, out of a first boundary region and a second boundary region arranged adjacently in a Y-direction and extending in an X-direction, mirror elements arranged at a first pitch not resolved by a projection optical system, in the X-direction in the first boundary region are set in the phase 0, and the other mirror elements therein are set in the phase À; mirror elements arranged at a second pitch not resolved by the projection optical system, in the X-direction in the second boundary region are set in the phase À, and the other mirror elements therein are set in the phase 0. When a pattern is projected onto an object with use of the spatial light modulator, the pattern can be formed with position accuracy or shape accuracy finer than a width of an image of each optical element of the spatial light modulator. |
