Bolometric detector of an electromagnetic radiation in the terahertz range and detector array device comprising said detectors

摘要

A bolometric detector of a terahertz radiation, including an assembly reflective for said electromagnetic radiation; at least one bolometric microbridge suspended above the reflective assembly and including a first bowtie antenna, a resistive load coupled with said antenna, and a thermometric element coupled with the resistive load. The reflective assembly includes a reflective layer; an insulating layer on the reflective layer; a periodic array of metallic patterns on the insulating layer, the thickness and the dielectric permittivity of the insulating layer, and the pitch and the filling factor of the array being selected to obtain a constructive interference at the level of said microbridge.

主权项

1. A bolometric detector of an electromagnetic radiation in a terahertz wavelength range, comprising:
a support comprising an assembly reflective for said electromagnetic radiation; at least one bolometric microbridge suspended above the reflective assembly by support (108) and thermal insulation pads, the microbridge comprising:
a first bowtie antenna intended to collect said electromagnetic radiation;a resistive load coupled with said antenna to convert the collected electromagnetic power into thermal power; anda thermometric element coupled with the resistive load to heat up under the effect of the generated thermal power,wherein the reflective assembly comprises:
a layer reflective for said electromagnetic radiation; an insulating material layer formed on the reflective layer; and a periodic array of metallic patterns formed on the insulating material layer, the thickness and the dielectric permittivity of the insulating material layer, and the pitch and the filing factor of the array being selected to obtain a constructive interference, at the level of said microbridge, between the incident radiation to be detected and the radiation reflected by said reflective assembly.