发明名称 INTERPOSER SUBSTRATE AND METHOD OF MANUFACTURING THE INTERPOSER SUBSTRATE
摘要 <p>Disclosed is an interposer substrate. The interposer substrate includes a lower plate and an upper plate, an insulating layer which is located between the lower plate and the upper plate and combines the lower plate and the upper plate, and a through electrode which penetrates the lower plate, the insulating layer, and the upper plate.</p>
申请公布号 KR101465361(B1) 申请公布日期 2014.11.25
申请号 KR20130103971 申请日期 2013.08.30
申请人 RESEARCH & BUSINESS FOUNDATION SUNGKYUNKWAN UNIVERSITY 发明人 SUH, SU JEONG;PARK, HWA SUN
分类号 H01L23/12 主分类号 H01L23/12
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