PNEUMATIC APPARATUS FOR MIRROR POLISHING AND GRAVITY COMPENSATION

摘要

The present invention relates to a gravity compensating device applied to a pneumatic system of an optical mirror, a gravity compensating method, and a pneumatic system of an optical mirror having a gravity compensating device. According to the present invention, the pneumatic system comprises: a pneumatic housing combined with the rear side to have the specific space with the rear side of an optical mirror having multiple grooves in the rear side; an external pneumatic cap equipped between the optical mirror and the pneumatic housing to seal the specific space in order to match the shape of the inner circumferential surface with the shape of the outer circumferential surface of the optical mirror; a pressure pressing means for floating the optical mirror by pressing the specific space; and a gravity compensating device including at least one weight having a specific weight equipped in one side of the outer circumferential surface of the external pneumatic cap installed to surround the the outer circumferential surface of the optical mirror, and a moving means for moving the weight in the vertical direction of the center of gravity of the optical mirror. The pneumatic system of the optical mirror having the gravity compensating device is capable of effectively offsetting the movement of the center of gravity of the optical mirror caused by the processing amount of the optical mirror surface, and the surface shape distortion of the optical mirror generated thereby by adjusting the location and the weight of the weight.