IMPROVED BOAT, AND HEAT TREATMENT CHAMBER AND APPARATUS OF SUBSTRATE HAVING THE SAME

摘要

Disclosed are an improved boat, a heat treatment chamber, and a device for a substrate therewith. The boat used in a chamber for heat treatment according to the present invention comprises a first support part; a second support part spaced from the first support part; multiple cross bars of which one side is coupled to the first support part and the other side is coupled to the second support part to have gaps between the first and second support parts; and multiple support pins which are formed on the cross bars to support holders where the substrate is installed.