发明名称 Method of fabricating an optical-fiber-compatible sensor
摘要 A method for fabricating a sensor is provided, with the sensor including a reflective element and an optical fiber positioned relative to the reflective element such that light emitted from the optical fiber is reflected by the reflective element and propagates in an optical cavity between the optical fiber and the reflective element. The method includes positioning an element within the optical cavity. The element has a coefficient of thermal expansion and a thickness that compensate a refractive index change with temperature of a medium within the optical cavity.
申请公布号 US8897610(B2) 申请公布日期 2014.11.25
申请号 US201313972817 申请日期 2013.08.21
申请人 The Board of Trustees of the Leland Stanford Junior University 发明人 Akkaya Onur Can;Digonnet Michel J. F.;Kilic Onur;Kino Gordon S.;Solgaard Olav
分类号 G02B6/00;G01H9/00;G02B6/12 主分类号 G02B6/00
代理机构 Knobbe, Martens, Olson & Bear LLP 代理人 Knobbe, Martens, Olson & Bear LLP
主权项 1. A method of fabricating a sensor, the method comprising: providing a movable element; positioning an optical fiber relative to the movable element to form an optical cavity such that light propagates in the optical cavity between the optical fiber and the movable element and is reflected by the movable element, the optical cavity comprising a medium having a refractive index change with temperature; and positioning an element within the optical cavity, the element having a coefficient of thermal expansion and a thickness that compensate the refractive index change with temperature.
地址 Palo Alto CA US