Receptor-catalyst growth process for carbon nanotubes

摘要

A method of growing carbon nanomaterials on a substrate wherein the substrate is exposed to an oxidizing gas; a seed material is deposited on the substrate to form a receptor for a catalyst on the surface of said substrate; a catalyst is deposited on the seed material by exposing the receptor on the surface of the substrate to a vapor of the catalyst; and substrate is subjected to chemical vapor deposition in a carbon containing gas to grow carbon nanomaterial on the substrate.

主权项

1. A method of growing carbon nanomaterials on a substrate comprising:
providing a substrate having a surface; exposing at least a portion of said surface of said substrate to an oxidizing gas; depositing a seed material to form a receptor for a catalyst on the surface of said substrate, the seed material being a metal compound applied to the oxidized surface and having receptor sites for the catalyst, wherein the seed material is deposited on the substrate by treating the substrate with a solution of the seed material; depositing a catalyst directly on the seed material by exposing the receptor on the surface of the substrate to a vapor of the catalyst; and subjecting the catalyst on the surface of the substrate to chemical vapor deposition in a carbon containing gas to cause growth of the carbon nanomaterial.