SUBSTRATE PROCESSING APPARATUS, STORAGE DEVICE, AND METHOD OF TRANSPORTING SUBSTRATE STORING CONTAINER

摘要

In a substrate processing apparatus, a storage device, an indexer block, a processing block and an interface block are arranged to line up in this order. The storage device includes a plurality of openers on which a carrier storing a plurality of substrates can be placed. The carrier is carried in the storage device. In the storage device, the carrier is transported among the plurality of openers by a transport device. The transport device includes first and second hands configured to be able to hold the carrier and move in a horizontal direction and a vertical direction. The second hand is provided below the first hand.

主权项

1. A substrate processing apparatus arranged to perform given processing on substrates, comprising:
a storage device in and from which a substrate storing container storing a plurality of substrates is carried; a main body arranged to take out the substrates from the substrate storing container carried in the storage device, perform the given processing on the taken out substrates, and store the substrates after the processing in the substrate storing container; and a controller arranged to control an operation of the storage device, wherein the storage device includes: a plurality of platforms on which the substrate storing container is to be placed; and a transport device arranged to transport the substrate storing container among the plurality of platforms, the transport device includes first and second holders configured to be capable of holding an upper portion of the substrate storing container and moving independently from each other among the plurality of platforms, the second holder is provided below the first holder, and the controller sets a distance in a vertical direction between the first holder and the second holder to be larger than a height of the substrate storing container such that the substrate storing container held by the first holder is positioned between the first holder and the second holder when the substrate storing container is transferred between the first holder and any of the plurality of platforms, and sets the distance in the vertical direction between the first holder and the second holder to be smaller than the height of the substrate storing container when the substrate storing container is transferred between the second holder and a platform arranged at a highest position.