OPTICAL NON-DESTRUCTIVE INSPECTION METHOD AND OPTICAL NON-DESTRUCTIVE INSPECTION APPARATUS

摘要

In an optical non-destructive inspection method which can perform inspection accurately in a short time. In the method, a heating laser beam source, at least one infrared detector, a control unit, and a storage unit are used. The storage unit stores a parameter state-time constant characteristic in which a parameter corresponding to a state of the measurement object is correlated with a time constant indicating the curve shape of the temperature rise characteristic that varies depending on the state of the parameter. The control unit determines the time constant based on the curve shape of the temperature rise characteristic, which extends from a heating start time point to a time point at which a saturated temperature is reached, and determines the state of the parameter of the measurement object based on the determined time constant and the parameter state-time constant characteristic.

主权项

1. An optical non-destructive inspection method comprising:
a heating laser irradiation in which a control unit controls a heating laser beam source so as to irradiate a measurement spot set on a measurement object with a heating laser beam; an emitted-infrared detection in which the control unit detects an infrared light beam with a predetermined infrared wavelength extracted out of light emitted from the measurement spot, by using an infrared detector; and a temperature rise characteristic measurement in which the control unit measures a temperature rise characteristic based on a detected value detected in the emitted-infrared detection and a heating time during which irradiation with the heating laser beam is performed, the temperature rise characteristic being a temperature rise state of the measurement spot based on the heating time, wherein the optical non-destructive inspection method is performed by an optical non-destructive inspection apparatus, and wherein the optical non-destructive inspection apparatus includes
the heating laser beam source that emits the heating laser beam having a heating laser wavelength and having output power set so as to heat the measurement object without destroying the measurement object,at least one infrared detector that detects an infrared light beam,the control unit that controls the heating laser beam source and acquires a detection signal form the at least one infrared detector, anda storage unit that stores a parameter state-time constant characteristic in which a state of a parameter corresponding to a state of the measurement object to be determined is defined, and a time constant indicating a curve shape of the temperature rise characteristic is correlated with the state of the parameter, the temperature rise characteristic varying depending on the state of the parameter.