MICROMECHANICAL COMPONENT, MANUFACTURING METHOD FOR A MICROMECHANICAL COMPONENT AND METHOD FOR MOUNTING A MICROMECHANICAL COMPONENT

摘要

A micromechanical component having a sensor chip is described, on and/or in which at least one sensor element is disposed, and a cladding, formed of an injection-molding material, encloses the sensor chip in such a way that at least one partial area of a surface of the sensor chip is covered in airtight fashion by the injection-molding material. At least one channel is formed in the injection-molding material, which takes a course, straight or not straight, from an outer surrounding area of the cladding toward the at least one sensor element of such a length that a change in shape and/or a change in chemical consistency of at least one part of the at least one sensor element is able to be brought about as a function of at least one physical property and/or at least one chemical partial composition of a medium present in the at least one channel.

主权项

1. A micromechanical component, comprising:
a sensor chip; at least one sensor element disposed at least one of on and in the sensor chip, wherein at least one of a change in shape and a change in chemical consistency of at least one part of the at least one sensor element is able to bring about a change in an electrical property of the sensor element; and a cladding, formed of an injection-molding material, and enclosing the sensor chip at least partially in such a way that at least one partial area of at least one surface of the sensor chip is covered in airtight fashion by the injection-molding material; wherein:
at least one channel is formed in the injection-molding material,the at least one channel takes one of a straight course and a course that is not straight from an outer surrounding area of the cladding toward the at least one sensor element,the at least one channel is of such a length that at least one of the change in shape and the change in chemical consistency of the at least one part of the at least one sensor element is able to be brought about as a function of at least one of at least one physical property and at least one chemical partial composition of a medium present in the at least one channel.