发明名称 FOREIGN OBJECT REMOVAL DEVICE AND METHOD FOR PRODUCING SOLAR CELL USING SAME
摘要 In the present invention, a rotating brush (37) of soft hairs produced at high precision and having an outer diameter equivalent to a texture size is contacted to a (solar) cell (10) immediately after CVD film production by an amount corresponding to the texture size; p-n junction breakage resulting from texture chipping is avoided; and only CVD foreign objects such as foreign object microparticles (14) and foreign object coarse particles (14G) are eliminated by means of the rotational force of the rotating brush (37). As a result, it is possible to produce a solar cell without a brush material adhering to the cell surface in a manner so as to cause problems in a printing step or in a manner so as to cause scratches at the cell surface, even while eliminating CVD foreign objects that lead to a hindrance in the printing of a grid electrode having a width of 30-150 μm.
申请公布号 WO2014184876(A1) 申请公布日期 2014.11.20
申请号 WO2013JP63439 申请日期 2013.05.14
申请人 MITSUBISHI ELECTRIC CORPORATION 发明人 NAKATANI, MITSUNORI;KURODA, AKIHIRO;ASANO, TOSHIYA;OKIMOTO, TAKASHI
分类号 B08B1/02;B08B1/04;B08B5/02;B08B5/04;H01L21/304;H01L31/042 主分类号 B08B1/02
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