发明名称 Thin-Film Transistor Sensor and Method of Manufacturing the TFT Sensor
摘要 According to an aspect of the present invention, there is provided a thin-film transistor (TFT) sensor, including a bottom gate electrode on a substrate, an insulation layer on the bottom gate electrode, an active layer in a donut shape on the insulation layer, the active layer including a channel through which a current generated by a charged body flows, an etch stop layer on the active layer, the etch stop layer including a first contact hole and a second contact hole, and a source electrode and a drain electrode burying the first and second contact holes, the source and drain electrodes being disposed on the etch stop layer so as to face each other.
申请公布号 US2014339562(A1) 申请公布日期 2014.11.20
申请号 US201414447325 申请日期 2014.07.30
申请人 SAMSUNG DISPLAY CO., LTD. 发明人 KIM Mu-Gyeom;PARK Chang-Mo
分类号 H01L29/786 主分类号 H01L29/786
代理机构 代理人
主权项
地址 Yongin-City KR