| 发明名称 |
THIN FILM BULK ACOUSTIC RESONATOR AND METHOD FOR MANUFACTURING SAME |
| 摘要 |
A thin film bulk acoustic resonator and a method of manufacturing the same is disclosed. The thin film bulk acoustic resonator includes an acoustic resonator including a first electrode, a second electrode, and a piezoelectric layer disposed between the first electrode and the second electrode; an air gap disposed below the acoustic resonator and above a substrate to reflect the acoustic wave; and an anchor disposed on each of both surfaces of the air gap and having the same thickness as the air gap. |
| 申请公布号 |
US2014339959(A1) |
申请公布日期 |
2014.11.20 |
| 申请号 |
US201214353561 |
申请日期 |
2012.06.07 |
| 申请人 |
Lee Moon Chul;Song In Sang;Kim Duck Hwan;Kim Chul Soo;Son Sang Uk;Shin Jea Shik;Park Ho Soo;Cui Jing |
发明人 |
Lee Moon Chul;Song In Sang;Kim Duck Hwan;Kim Chul Soo;Son Sang Uk;Shin Jea Shik;Park Ho Soo;Cui Jing |
| 分类号 |
H03H9/17;H01L41/297;H01L41/312;H01L41/332 |
主分类号 |
H03H9/17 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A film bulk acoustic resonator (FBAR), comprising:
an acoustic resonance unit comprising a first electrode, a second electrode, and a piezoelectric layer disposed between the first electrode and the second electrode; an anchor disposed on both sides of the air gap, the anchor having a thickness identical to that of the air gap. |
| 地址 |
Yongin-si KR |
