发明名称 |
PLASMA GENERATOR INCLUDING MULTI ELECTRODES AND METHOD FOR GENERATING PLASMA USING THE SAME |
摘要 |
<p>Disclosed is a plasma generator. The plasma generator includes a main body for generating plasma through a pulse signal applied to a multi-electrode; a source power for applying pulse signals having mutually different frequencies to the multi-electrode; and a main control unit for adjusting a clock signal applied to the source power to synchronize the pulse signals applied to the multi-electrode so that the main control unit controls properties of the plasma by controlling the pulse signals to the source power.</p> |
申请公布号 |
KR101463109(B1) |
申请公布日期 |
2014.11.20 |
申请号 |
KR20120119405 |
申请日期 |
2012.10.26 |
申请人 |
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发明人 |
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分类号 |
H01L21/3065;H05H1/34;H05H1/46 |
主分类号 |
H01L21/3065 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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