| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a vibrator in which a vibration loss due to resonance is restrained.SOLUTION: The vibrator comprises: a substrate; an electrode part having a first electrode and a second electrode provided on one face of the substrate; a vibration part having a first vibration body isolated from the first electrode and extending from a base so that one part thereof is overlaid, and a second vibration body isolated from the second electrode and extending from the base in a direction crossing with a direction in which the first vibration body extends so that one part thereof is overlaid; a support part having a beam part extending from the base; a fixing part provided on the second electrode and connected to the support part; a first crossing part connected to the fixing part at both ends, isolated from the first electrode, and provided so that one part thereof is overlaid; and a second crossing part connected to the first electrode at one end, isolated from the second electrode, and provided so that one part thereof is overlaid. The vibrator has a difference between a vibration frequency of the vibration part and a resonance frequency of the first crossing part and the second crossing part.</p> |
